Week

Unit Topics

Week

Unit Topics

1^st Week

The Development History of Semiconductors and Integrated Circuits

10^th Week

Thin Film Deposition - Chemical Vapor Deposition

2^nd Week

An Overview of Integrated Circuit Manufacturing Processes and Equipment

11^th Week

Thin Film Deposition - Physical Vapor Deposition (1)

3^rd Week

Silicon Wafer Production

12^th Week

Thin Film Deposition - Physical Vapor Deposition (2)

4^th Week

Photolithography Process Technology (1)

13^th Week

Chemical Mechanical Planarization

 5^th Week

Photolithography Process Technology (2)

14^th Week

VR System Operation and Immersive Experience (1): Electron Beam Evaporation

6^th Week

Etching Process Technology

15^th Week

VR System Operation and Immersive Experience (2): High-Vacuum Magnetron Sputtering

7^th Week

Doping Process Technologies - Diffusion

16^th Week

VR System Operation and Immersive Experience (3): Photomask Aligner

8^th Week

Doping Process Technologies - Ion Implantation

17^th Week

VR System Operation and Immersive Experience (4): Reactive Ion Etching (RIE)

9^th Week

Midterm Exam

18^th Week

Final Exam

Course Category

■Innovative Teaching Course ■Innovation and Entrepreneurship Course □Programming Course ■STEM Field Courses □Technical Excellence Leadership Program □Next Generation Talent Cultivation Program for Vocational and Technical Colleges □Teaching Practice Research Project □Others(Service Learning. Labor Education)

Course Content

■Teaching Material Innovation ■Teaching content is designed with appropriate design thinking ■Teaching content aligns with innovative practices □Enhance students' basic understanding of logical operations and programming design □Cultivate students to use programming to solve real-world problems ■Engineering, manufacturing, and construction fields

Foreign Language Teaching

■Full Immersion Language Instruction □EMI(English Medium Instruction)Less then 70%

Integration of the United Nations Sustainable Development Goals into the Curriculum(SDGs)

□SDG1(No Poverty) □SDG2(Zero Hunger) □SDG3(Good Health and Well-Being) □SDG4(Quality Education) □SDG5(Gender Equality) □SDG6(Clean Water and Sanitation) □SDG7(Affordable and Clean Energy) ■SDG8(Decent Work and Economic Growth) ■SDG9(Industry, Innovation and Infrastructure) □SDG10(Reduced Inequalities) □SDG11(Sustainable Cities and Communities) □SDG12(Responsible Consumption and Production) □SDG13(Climate Action) □SDG14(Life below Water) □SDG15(Life on Land) □SDG16(Peace,Justice and Strong Institutions) □SDG17(Partnerships for the Goals) □None of Above

Teaching Methods

■Introduction  ■Group discussion  □Practice  □Collaboration with industry experts  □Field Study  □Online Teaching (Please check at least two of the above)

Grading Assessment

Attend:20%  Test:20%  paper report/ presentation:20%  oral presentation:30%  Others:10% Interaction, note-taking, or asking questions

Teaching Materials

■textbook (No copies for intellectual property rights.!)
Self-compiled textbook
■Reference book (No copies for intellectual property rights.!)  
Fundamentals of Semiconductor Manufacturing and Process Control – Gary S. May, Costas J. Spanos

Cultivate student's basic ability and professional ability index project

²Core Capabilities： □語文表達與溝通 □資訊素養與科技 ■實務技能與創新 □團隊合作與倫理

²General Ability： ¤Art Appreciation and Life Application  ¤Life experience and physical and mental health care  ¤Social Responsibility and the Rule Law for Human Rights  ¤Science Applications and Environmental Trends

²Professional Ability： ■數理基礎 □資訊應用 □晶片應用 ■思考分析 □製造模組 □規畫應用 ■產業學習 ■體現科技

²Demonstrate Ability： ¤Professional Attitude and Emotional Management  ¤Self Traits and Career Orientation  ¤Civic Character and Service Learning  ¤Strengths development and function demonstration